VLSI Technology describes the theoretical and pracital aspects of the most advanced state of electronology - very large -scale integration ( VLSI) . rnfrom crystal growth to reliability testing , the reader is presendted with all the mayor steps in the febrication of VLSI circuits.
The book is intended as textbook for senior undergraduate or first-year graduate students in electrical engineering, applied physics, and material science; it assumes that the reader has already acquired an introductory understanding of the physics and technology of semiconductor devices.